Preparation of Al-doped ZnO thin film deposited at room temperature

Colloids and Surfaces A: Physicochemical and Engineering Aspects

Volumn 313-314, Issue , 2008, Pages 461-464

  Rim, You Seung ^a   Kim, Sang Mo ^a   Choi, Hyung Wook ^a   Park, Sang Joon ^a   Kim, Kyung Hwan ^a  

^a Gachon University College of Medicine   (South Korea)

Author keywords

AZO; FTS; PES; Sputtering; Thin film; ZnO

Indexed keywords

ALUMINUM; ELECTRIC PROPERTIES; FLOW OF GASES; SPUTTERING; ZINC OXIDE;

FACING TARGETS SPUTTERING (FTS); POLYETHERSULFONE (PES); ROOM TEMPERATURE;

THIN FILMS;

ALUMINUM; GLASS; POLYETHERSULFONE; ZINC OXIDE;

ARTICLE; CHEMICAL STRUCTURE; ELECTROCHEMICAL ANALYSIS; GAS FLOW; MATERIALS TESTING; PRIORITY JOURNAL; ROOM TEMPERATURE; SYNTHESIS;

EID: 37349008188     PISSN: 09277757     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.colsurfa.2007.04.138     Document Type: Article

References (18)

1. Rech B., Wieder S., Beneking C., Loffl A., Kluth O., Reetz W., and Wanger H. Proceedings of the 26th IEEE Photovoltaic Specialists Conference. Anaheim (1997) 619
2. Bose S., and Barua A.K. J. Phys. D: Appl. Phys. 32 (1999) 213
3. Lan J.H., Kanicki J., Catalano A., and Keane J. Proceedings of the Second IEEE International Workshop on Active Matrix Liquid Crystal Displays. New York (1995) 54
4. Cao H.T., Sun C., Pei Z.L., Wang A.Y., Wen L.S., Hong R.J., and Jiang X. J. Mater. Sci. 15 (2004) 169
5. Tiburcio-Silver A., Joubert J.C., and Labeau M. J. Appl. Phys. 76 (1994) 1992
6. Lokhande B.J., and Uplane M.D. Appl. Surf. Sci. 167 (2000) 243
7. Hayamizu S., Tamaka H., and Kawai T. J. Appl. Phys. 80 (1996) 787
8. Narasimahar K.L., Pai S.P., Palkar V.R., and Pinto P. Thin Solid Films 295 (1997) 104
9. Wenas W.W., Yamada A., Takahashi K., Yoshino M., and Konagai M. J. Appl. Phys. 70 (1991) 7119
10. Natsume Y., Sakata H., and Hirayama T. J. Appl. Phys. 72 (1992) 4203
11. Natsume Y., and Sakata H. Thin Solid Films 372 (2000) 30
12. Kim K.H., Park K.C., and Ma D.Y. J. Appl. Phys. 81 (1997) 7764
13. Bose S., Ray S., and Barua A.K. J. Phys. D: Appl. 29 (1996) 1873
14. Yang J.S., Seong H.Y., Keum M.J., Son I.H., and Kim K.H. Surf. Coat. Technol. 169/170 (2003) 575
15. Kim Y.S., Park W.H., Kong S.H., Nakagawa S., and Kim K.H. Surf. Coat. Technol. 169/170 (2003) 532
16. Igaski Y., and Saito H. J. Appl. Phys. 70 (1991) 3613
17. Igaski Y., and Saito H. J. Appl. Phys. 69 (1991) 2190
18. Tsuji T., and Hirohashi M. Appl. Surf. Sci. 157 (2000) 410