The low temperature synthesis of Al doped ZnO films on glass and polymer using magnetron co-sputtering: Working pressure effect

Surface and Coatings Technology

Volumn 200, Issue 1-4 SPEC. ISS., 2005, Pages 936-939

  Chung, Yun M ^a   Moon, Chang S ^a   Jung, Min J ^a   Han, Jeon G ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

Al doped ZnO; Co sputtering; Polymer; Working pressure

Indexed keywords

ALUMINUM; GLASS; LOW TEMPERATURE EFFECTS; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; POLYMERS; PRESSURE EFFECTS; SYNTHESIS (CHEMICAL); ZINC OXIDE;

LOW TEMPERATURE SYNTHESIS; WORKING PRESSURE EFFECT;

THIN FILMS;

FILM;

EID: 24644452505     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.02.197     Document Type: Article

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