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Volumn 616, Issue 2-3, 2010, Pages 203-206

Stitching-angle measurable microscopic-interferometer: Surface-figure metrology tool for hard X-ray nanofocusing mirrors with large curvature

Author keywords

Focusing; Optical interferometer; Stitching interferometry; Surface figure metrology; Surface profiler; X ray mirror

Indexed keywords

OPTICAL INTERFEROMETER; STITCHING INTERFEROMETRY; SURFACE FIGURE; SURFACE PROFILERS; X RAY MIRRORS; X-RAY MIRROR;

EID: 77950826115     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2009.11.073     Document Type: Article
Times cited : (27)

References (19)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.