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Volumn 616, Issue 2-3, 2010, Pages 203-206
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Stitching-angle measurable microscopic-interferometer: Surface-figure metrology tool for hard X-ray nanofocusing mirrors with large curvature
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Author keywords
Focusing; Optical interferometer; Stitching interferometry; Surface figure metrology; Surface profiler; X ray mirror
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Indexed keywords
OPTICAL INTERFEROMETER;
STITCHING INTERFEROMETRY;
SURFACE FIGURE;
SURFACE PROFILERS;
X RAY MIRRORS;
X-RAY MIRROR;
FOCUSING;
INTERFEROMETERS;
INTERFEROMETRY;
MIRRORS;
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EID: 77950826115
PISSN: 01689002
EISSN: None
Source Type: Journal
DOI: 10.1016/j.nima.2009.11.073 Document Type: Article |
Times cited : (27)
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References (19)
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