Microstitchino, interferometry for x-ray reflective optics

Review of Scientific Instruments

Volumn 74, Issue 5, 2003, Pages 2894-2898

  Yamauchia, Kazuto ^a   Yamamura, Kazuya ^a   Mimura, Hidekazu ^a   Sano, Yasuhisa ^a   Saito, Akira ^a   Ueno, Kazumasa ^a   Endo, Katsuyoshi ^a   Souvorov, Alexei ^b   Yabashi, Makina ^b   Tamasaku, Kenji ^c   Ishikawa, Tetsuya ^c   Morib, Yuzo ^a  

^a OSAKA UNIVERSITY   (Japan)

^b SPring 8/Japan Synchrt Radiat RI ^*  (Japan)

^c SPring 8/RIKEN ^*  (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MIRRORS; REFLECTION; SYNCHROTRON RADIATION; X RAY OPTICS;

OPTICAL CAVITY;

INTERFEROMETRY;

EID: 0038527372     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1569405     Document Type: Article

References (25)

1. T. Ishikawa, K. Tamasaku, M. Yabashi, S. Goto, Y. Tanaka, H. Yamazaki, K. Takeshita, H. Kimura, H. Ohashi, T. Matsushita, and T. Ohata, Proc. SPIE 4154, 1 (2001).
2. B. C. Larson, W. Young, G. E. Ice, J. D. Budai, and J. Z. Tischler, Nature (London) 415, 887 (2002).
3. C. Martin, G. Eeckhaut, A. Mahendrasingam, D. J. Blundell, W. Fuller, R. J. Oldman, S. J. Bingham, T. Dieing, and C. Riekel, J. Synchrotron Radiat. 7, 245 (2000).
4. Y. Mori, K. Yamauchi, K. Yamamura, H. Mimura, A. Saito, H. Kishimoto, Y. Sekito, M. Kanaoka, A. Souvorov, M. Yabashi, K. Tamasaku, and T. Ishikawa, Proc. SPIE 4501, 30 (2001).
5. A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, Y. Mori, K, Yamauchi, K. Yamamura, and A. Saito, J. Synchrotron Radiat. 9, 223 (2002).
6. K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, M. Kanaoka, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori (unpublished).
7. K. B. Becker, in Precision Science and Technology for Perfect Surfaces, edited by Y. Furukawa, Y. Mori, and T. Kataoka (Japan Society for Precision Engineering, Tokyo, 1999), p. 51.
8. Y. Mori, K. Yamauchi, and K. Endo, Precis. Eng. 9, 123 (1987).
9. Y. Mori, K. Yamauchi, and K. Endo, Precis. Eng. 10, 24 (1988).
10. Y. Mori, K. Yamauchi, K. Endo, T. Ide, H. Toyota, K. Nishizawa, and M. Hasegawa, J. Vac. Sci. Technol. A 8, 621 (1990).
11. K. Yamauchi, K. Hirose, H. Goto, K. Sugiyama, K. Inagaki, K. Yamamura, Y. Sano, and Y. Mori, Comput. Mater. Sci. 14, 232 (1999).
12. Y. Mori, K. Yamauchi, K. Sugiyama, K. Inagaki, S. Shimada, J. Uchikoshi, H. Mimura, T. Imai, and K. Kanemura, in Precision Science and Technology for Perfect Surfaces, edited by Y. Furukawa, Y. Mori, and T. Kataoka (Japan Society for Precision Engineering, Tokyo, 1999), p. 207.
13. Y. Mori, K. Yamamura, and Y. Sano, Rev. Sci. Instrum. 71, 4627 (2000).
14. Y. Mori, K. Yamauchi, K. Yamamura, and Y. Sano, Rev. Sci. Instrum. 71, 4620 (2000).
15. H. Takino, N. Shibata, H. Itoh, T. Kobayashi, H. Tanaka, M. Ebi, K. Yamamura, Y. Sano, and Y. Mori, Jpn. J. Appl. Phys., Part 2 37, L894 (1998).
16. H. Takino, N. Shibata, H. Itoh, T. Kobayashi, H. Tanaka, M. Ebi, K. Yamamura, Y. Sano, and Y. Mori, Appl. Opt. 37, 5198 (1998).
17. P. Z. Takacs, Proc. SPIE 749, 59 (1987).
18. M. Negishi, K. Watanabe, K. Matsusita, T. Kasahara, and K. Hosaka, in Precision Science and Technology for Perfect Surfaces, edited by Y. Furukawa, Y. Mori, and T. Kataoka (Japan Society for Precision Engineering, Tokyo, 1999), p. 354.
19. H. Shiozawa and Y. Fukutomi, in Precision Science and Technology for Perfect Surfaces, edited by Y. Furukawa, Y. Mori, and T. Kataoka (Japan Society for Precision Engineering, Tokyo, 1999), p. 360.
20. M. Bray, Proc. SPIE 4451, 375 (2001).
21. S. Chakmakjian, J. Biegen, and P. de Groot, Technical Digest of International Workshop on Interferometry (Riken, Japan, 1996), p. 171.
22. MetroPro™(tm) Reference Guide Version 7. 4. 2 OMP-0347E (Zygo Corporation, 2001), p. 37.
23. R. A. Smythe, J. A. Soobitsky, and B. E. Truax, Proc. SPIE 816, 95 (1987).
24. W. Primak, Appl. Opt. 6, 1917 (1967).
25. K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, J. Synchrotron Radiat. 9, 313 (2002).