Stitching interferometric metrology for steeply curved x-ray mirrors

Surface and Interface Analysis

Volumn 40, Issue 6-7, 2008, Pages 1023-1027

  Yumoto, Hirokatsu ^a,b   Mimura, Hidekazu ^a   Kimura, Takashi ^a   Handa, Soichiro ^a   Matsuyama, Satoshi ^a   Sano, Yasuhisa ^a   Yamauchi, Kazuto ^a  

^a OSAKA UNIVERSITY   (Japan)

^b JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE   (Japan)

Author keywords

Stitching interferometry; Surface metrology; X ray focusing; X ray mirror; X ray optics

Indexed keywords

GEODETIC SATELLITES; INTERFEROMETERS; LASER OPTICS; MICHELSON INTERFEROMETERS; MIRRORS; OPTICAL INSTRUMENTS; OPTICAL TESTING;

ELLIPTICALLY FIGURED MIRROR; FIZEAU INTERFEROMETERS; FLAT MIRRORS; HARD X RAY FOCUSING; HARD X-RAY (HXR); INTERFEROMETRIC METROLOGY; LARGE AREAS; RELATIVE ANGLE (RA); ROOT MEAN SQUARE (R.M.S.); STITCHING INTERFEROMETRY; SUB NANOMETER; SURFACE FIGURE; X RAY MIRRORS;

INTERFEROMETRY;

EID: 47749088217     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2807     Document Type: Conference Paper

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