Performance test of fresnel zone plate with 50 nm outermost zone width in hard X-ray region

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 4 A, 2005, Pages 1994-1998

  Suzuki, Yoshio ^a   Takeuchi, Akihisa ^a   Takano, Hidekazu ^b   Takenaka, Hisataka ^c  

^a JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE   (Japan)

^b NIHON UNIVERSITY   (Japan)

^c NTT Advance Technology Corporation   (Japan)

Author keywords

Fresnel zone plate; Microbeam; Synchrotron radiation; X ray; X ray microscopy; Zone plate

Indexed keywords

CRYSTALS; DIFFRACTION; ELECTRON BEAM LITHOGRAPHY; LENSES; MEMBRANES; MONOCHROMATORS; MULTILAYERS; SILICON NITRIDE; SYNCHROTRON RADIATION;

FRESNEL ZONE PLATE; MICROBEAM; X-RAY MICROSCOPY; ZONE PLATE;

X RAYS;

EID: 21244467150     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.44.1994     Document Type: Article

References (15)

1. W. Yun, B. Lai, Z. Cai, J. Maser, D. Legnini, E. Gluskin, Z. Chen, A. A. Krasnoperova, Y. Vladimirsky, F. Cerrina, E. Di. Fabrizio and M. Gentili: Rev. Sci. Instrum. 70 (1999) 2238.
2. H. Takano, Y. Suzuki and A. Takeuchi: Jpn. J. Appl. Phys. 42 (2003) L132.
3. K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa and Y. Mori: Jpn. J. Appl. Phys. 42 (2003) 7129.
4. Y. Mori, K. Yamauchi, K. Yamamura, H. Mimura, A. Saito, Y. Sano, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku and T. Ishikawa: Proc. SPIE 5193 (2003) 11.
5. K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, S. Matsuyama, H. Yumoto, K. Ueno, M. Shibahara, K. Endo, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa and Y. Mori: to be published in Proc. SPIE 5533.
6. O. Hignette, P. Cloetens, W. Ludwig and G. Rostaing: J. Phys. IV France 104 (2003) 231.
7. O. Hignette, G. Rostaing, P. Cloetens, Y. Dabin, A. Rommeveaux, C. Morawe and A. K. Freund: ESRF Newslett. 37 (2003) 20.
8. C. Schroer, M. Kuhlmann, U. T. Hunger, T. F. Günzler, O. Kurapova, S. Feste, F. Frehse, B. Lengeler, M. Drakopoulos, A. Somogyi, A. S. Simionovici, A. Snigirev, I. Snigireva, C. Schug and W. H. Schröder: Appl. Phys. Lett. 82 (2003) 1485.
9. N. Kamijo, Y. Suzuki, H. Takano, S. Tamura, M. Yasumoto, A. Takeuchi and M. Awaji: Rev. Sci. Instrum, 74 (2003) 5101.
10. A. Ozawa, T. Tamamura, T. Ishii, H. Yoshihara and Y. Kagoshima: Microelectron. Eng. 35 (1997) 525.
11. A. Takeuchi, Y. Suzuki and H. Takano: J. Synchrotron Radiation 9 (2002) 115.
12. Y. Suzuki: Rev. Sci. Instrum. 75 (2004) 1026.
13. Y. Suzuki, et al.: AIP Conf. Proc. 705 (2004) 344.
14. Y. Suzuki and F. Uchida: Rev. Sci. Instrum. 63 (1992) 578.
15. Y. Suzuki, A. Takeuchi, H. Takano, T. Ohigashi and H. Takenaka: Proc. SPIE 4499 (2001) 74.