Microfabricated quadrupole mass spectrometer with a brubaker prefilter

Journal of Microelectromechanical Systems

Volumn 19, Issue 2, 2010, Pages 325-337

  Wright, Steven ^a   O'Prey, Shane ^a   Syms, Richard R A ^b   Hong, Guodong ^a   Holmes, Andrew S ^b  

^a Microsaic Systems Ltd   (United Kingdom)

^b IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

Mass spectrometry; Microelectromechanical systems (MEMS); Prefilter; Quadrupole filter

Indexed keywords

ANALYTIC THEORY; ANODIC BONDING; BIAS POTENTIAL; GLASS SUBSTRATES; ION MOTIONS; ION TRANSMISSION; MASS FILTERING; MICROELECTROMECHANICAL SYSTEMS; MICROFABRICATED; PEAK HEIGHT; PREFILTERS; QUADRUPOLE FILTER; QUADRUPOLE MASS SPECTROMETER; QUADRUPOLES; RADIO FREQUENCIES; WAFER-SCALE;

ELECTRODES; GLASS BONDING; IONS; MASS SPECTROMETERS; MASS SPECTROMETRY; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROFABRICATION; REACTIVE ION ETCHING; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SUBSTRATES; WAFER BONDING;

COMPOSITE MICROMECHANICS;

EID: 77950595654     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2040243     Document Type: Article

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