High-pressure effects in miniature arrays of quadrupole analyzers for residual gas analysis from 10-9 to 10-2 Torr

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 3, 1996, Pages 1258-1265

  Ferran, R J ^a   Boumsellek, S ^a  

^a Ferran Scientific Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000439125     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.579938     Document Type: Article

References (11)

1. L. Davies and R. J. Ferran (unpublished).
2. More details are given in U.S. Patent No. 5,401,962, March 1995 by R. J. Ferran.
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6. W. B. Herrmannsfeldt, EGUN - An Electron Optics and Gun Design Program (Stanford University, Stanford, CA, 1988).
7. M. C. Cowen, W. Allison, and J. H. Batey, J. Vac. Sci. Technol. A 12, 228 (1994).
8. S. Boumsellek and A. Chutjian, Anal. Chem. 64, 2096 (1992).
9. H. R. Skullerud, J. Phys. B 6, 728 (1973).
10. J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions In Solids (Pergamon, New York, 1985).
11. D. J. Douglas and J. B. French, J. Am. Soc. Mass. Spectrom. 3, 398 (1992).