Properties of highly electronegative plasmas produced in a multipolar magnetic-confined device with a transversal magnetic filter

Journal of Physics D: Applied Physics

Volumn 43, Issue 15, 2010, Pages

  Draghici, Mihai ^a,b   Stamate, Eugen ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b NATIONAL INSTITUTE OF MATERIALS PHYSICS   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

DC DISCHARGES; DENSITY RATIO; ELECTRONEGATIVE PLASMAS; ETCHING RATE; EXPERIMENTAL CONDITIONS; MULTIPOLAR MAGNETIC CONFINEMENT; PLASMA PARAMETER; PLASMA POTENTIAL; POSITIVE BIAS; WALL CONDITIONING;

ELECTRON TEMPERATURE; MAGNETIC FILTERS; MAGNETIC SEPARATORS; MASS SPECTROMETRY; NEGATIVE IONS; PLASMA DIAGNOSTICS; PLASMA SHEATHS;

ELECTRIC DISCHARGES;

EID: 77950587034     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/43/15/155205     Document Type: Article

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