Sheath-lens probe for negative ion detection in reactive plasmas

Journal of Applied Physics

Volumn 95, Issue 3, 2004, Pages 830-833

  Stamate, E ^a   Sugai, H ^a   Takai, O ^a   Ohe, K ^b  

^a NAGOYA UNIVERSITY   (Japan)

^b NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CURRENT DENSITY; ELECTRIC FIELD EFFECTS; ELECTRONS; MATHEMATICAL MODELS; NEGATIVE IONS; NONLINEAR EQUATIONS; OXYGEN; POISSON EQUATION; POSITIVE IONS; SULFUR COMPOUNDS;

ELECTRIC FIELD DISTRIBUTION; ELECTROSTATIC LENS EFFECT; NEGATIVE ION DETECTION; NONLINEAR POISSON EQUATION; REACTIVE PLASMAS; SHEATH LENS PROBE;

PLASMAS;

EID: 1142280327     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1619225     Document Type: Article

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