Electronegative plasmas diluted by rare gases

Journal of Physics D: Applied Physics

Volumn 36, Issue 21, 2003, Pages 2655-2659

  Franklin, R N ^a  

^a OPEN UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGED PARTICLES; CHLORINE; ELECTRON TRANSPORT PROPERTIES; INERT GASES; IONIZATION; NUMERICAL METHODS; PRESSURE EFFECTS;

DILUTION; ELECTRONEGATIVE PLASMAS; IONIZATION POTENTIAL; PENNING IONIZATION;

PLASMAS;

EID: 0242657878     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/36/21/009     Document Type: Article

References (12)

1. Franklin, R N and Snell J 1999 J. Phys. D: Appl. Phys. 32 2190
2. Franklin R N 2001 Plasma Sources Sci. Technol. 10 162
3. Franklin R N 2001 Proc. R. Soc. A 457 307
4. Franklin R N 2002 Plasma Sources Sci. Technol. 11 A31
5. Franklin R N 2003 J. Phys. D: Appl. Phys. 36 823
6. Musa G 2002 ESCAMPIG 16/ICRP 5 Conf. Proc. vol 2, p 29
7. Blanc A 1908 J. Phys. (Paris) 7 825
8. Massey, H S W and Burhop E P 1952 Electronic and Ionic Impact Phenomena (Oxford: Oxford University Press)
9. Meeks et al 1998 J. Vac. Sci. Technol. A 16 2227
10. Lieberman M A and Lichtenberg A J 1994 Principles of Plasma Discharges and Material Processing (New York: Wiley)
11. Franklin R N 2001 J. Phys. D: Appl. Phys. 34 1243
12. Franklin R N 1976 Plasma Phenomena in Gas Discharges (Oxford: Oxford University Press)