Determination of negative-ion and electron parameters in an Ar/SF6 plasma

Journal of Applied Physics

Volumn 84, Issue 5, 1998, Pages 2450-2458

  Stamate, E ^a,b   Ohe, K ^a  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

^b ALEXANDRU IOAN CUZA UNIVERSITY OF IASI   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001600008     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.368406     Document Type: Article

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