SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology B

Volumn 28, Issue 1, 2010, Pages

Electron holography for analysis of deep submicron devices: Present status and challenges

(7) Ikarashi, Nobuyuki a Toda, Akio a Uejima, Kazuya b Yako, Koichi b Yamamoto, Toyoji b Hane, Masami b Sato, Hiroshi c

a NEC CORPORATION (Japan)

b RENESAS TECHNOLOGY CORP (Japan)

c NEC Semiconductors Yamagata Ltd (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; ELECTRON HOLOGRAPHY; METALS; MOS DEVICES; OXIDE SEMICONDUCTORS;

DEEP-SUBMICRON DEVICES; DISTRIBUTION ANALYSIS; ENERGY RESOLUTIONS; GATE-LENGTH; ION MILLING; LOWER ENERGIES; METALOXIDE SEMICONDUCTOR FIELD-EFFECT TRANSISTOR (MOSFETS); POTENTIAL DISTRIBUTIONS; PRESENT STATUS; SOURCE/DRAIN REGIONS;

MOSFET DEVICES;

EID: 77949372117 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.3207964 Document Type: Conference Paper

Times cited : (16)

References (25)

1
- 77949415376
- Technical Digest-International Conference on Advanced Thermal Processing of Semiconductors, (unpublished),.
- M. Narihiro, Technical Digest-International Conference on Advanced Thermal Processing of Semiconductors, 2006 (unpublished), p. 147.
- (2006) , pp. 147
- Narihiro, M.¹

2
- 45149084291
- TDIMD5 0163-1918.
- K. Uejima, Tech. Dig.-Int. Electron Devices Meet. TDIMD5 0163-1918 2007, 151.
- Tech. Dig. - Int. Electron Devices Meet. , vol.2007 , pp. 151
- Uejima, K.¹

3
- 45149120618
- TDIMD5 0163-1918.
- H. Fukutome, Y. Momiyama, E. Yoshida, M. Okuno, T. Itakura, and T. Aoyama, Tech. Dig.-Int. Electron Devices Meet. TDIMD5 0163-1918 2005, 4.
- Tech. Dig. - Int. Electron Devices Meet. , vol.2005 , pp. 4
- Fukutome, H.¹ Momiyama, Y.² Yoshida, E.³ Okuno, M.⁴ Itakura, T.⁵ Aoyama, T.⁶

4
- 77949364266
- Technical Digest-International Reliability Physics Symposium, (unpublished),.
- L. Zhang, K. Adachi, K. Tanimoto, and A. Nishiyama, Technical Digest-International Reliability Physics Symposium, 2007 (unpublished), p. 516.
- (2007) , pp. 516
- Zhang, L.¹ Adachi, K.² Tanimoto, K.³ Nishiyama, A.⁴

5
- 45149116193
- JAPIAU 0021-8979,. 10.1063/1.2937246
- N. Ikarashi, T. Ikezawa, K. Uejima, T. Fukai, M. Miyamura, A. Toda, and M. Hane, J. Appl. Phys. JAPIAU 0021-8979 103, 114514 (2008). 10.1063/1.2937246
- (2008) J. Appl. Phys. , vol.103 , pp. 114514
- Ikarashi, N.¹ Ikezawa, T.² Uejima, K.³ Fukai, T.⁴ Miyamura, M.⁵ Toda, A.⁶ Hane, M.⁷

6
- 36449003599
- APPLAB 0003-6951,. 10.1063/1.112581
- M. R. McCartney, D. J. Smith, R. Hull, J. C. Bean, E. Voelkl, and B. Frost, Appl. Phys. Lett. APPLAB 0003-6951 65, 2603 (1994). 10.1063/1.112581
- (1994) Appl. Phys. Lett. , vol.65 , pp. 2603
- McCartney, M.R.¹ Smith, D.J.² Hull, R.³ Bean, J.C.⁴ Voelkl, E.⁵ Frost, B.⁶

7
- 0032620923
- PRLTAO 0031-9007,. 10.1103/PhysRevLett.82.2614
- W. D. Rau, P. Schwander, F. H. Baumann, W. Hoppner, and A. Ourmazd, Phys. Rev. Lett. PRLTAO 0031-9007 82, 2614 (1999). 10.1103/PhysRevLett.82.2614
- (1999) Phys. Rev. Lett. , vol.82 , pp. 2614
- Rau, W.D.¹ Schwander, P.² Baumann, F.H.³ Hoppner, W.⁴ Ourmazd, A.⁵

8
- 0037043008
- PRLTAO 0031-9007,. 10.1103/PhysRevLett.89.025502
- M. A. Gribelyuk, Phys. Rev. Lett. PRLTAO 0031-9007 89, 025502 (2002). 10.1103/PhysRevLett.89.025502
- (2002) Phys. Rev. Lett. , vol.89 , pp. 025502
- Gribelyuk, M.A.¹

9
- 36849066232
- IETDAI 0018-9383,. 10.1109/TED.2007.908901
- M. G. Han, J. Li, Q. Xie, P. Fejes, J. Conner, B. Taylor, and M. R. McCartney, IEEE Trans. Electron Devices IETDAI 0018-9383 54, 3336 (2007). 10.1109/TED.2007.908901
- (2007) IEEE Trans. Electron Devices , vol.54 , pp. 3336
- Han, M.G.¹ Li, J.² Xie, Q.³ Fejes, P.⁴ Conner, J.⁵ Taylor, B.⁶ McCartney, M.R.⁷

10
- 34848867188
- ARMRCU 1531-7331,. 10.1146/annurev.matsci.37.052506.084232
- H. Lichte, P. Formanek, A. Lenk, M. Linck, Ch. Matzeck, M. Lehmann, and P. Simon, Annu. Rev. Mater. Res. ARMRCU 1531-7331 37, 539 (2007). 10.1146/annurev.matsci.37.052506.084232
- (2007) Annu. Rev. Mater. Res. , vol.37 , pp. 539
- Lichte, H.¹ Formanek, P.² Lenk, A.³ Linck, M.⁴ Matzeck, Ch.⁵ Lehmann, M.⁶ Simon, P.⁷

11
- 34848890616
- ARMRCU 1531-7331,. 10.1146/annurev.matsci.37.052506.084219
- M. R. McCartney and D. J. Smith, Annu. Rev. Mater. Res. ARMRCU 1531-7331 37, 729 (2007). 10.1146/annurev.matsci.37.052506.084219
- (2007) Annu. Rev. Mater. Res. , vol.37 , pp. 729
- McCartney, M.R.¹ Smith, D.J.²

12
- 0037054193
- PRLTAO 0031-9007,. 10.1103/PhysRevLett.88.238302
- A. C. Twitchett, R. E. Dunin-Borkowski, and P. A. Midgley, Phys. Rev. Lett. PRLTAO 0031-9007 88, 238302 (2002). 10.1103/PhysRevLett.88.238302
- (2002) Phys. Rev. Lett. , vol.88 , pp. 238302
- Twitchett, A.C.¹ Dunin-Borkowski, R.E.² Midgley, P.A.³

13
- 14944350393
- ULTRD6 0304-3991,. 10.1016/j.ultramic.2004.11.018
- R. E. Dunin-Borkowski, S. B. Newcomb, T. Kasama, M. R. McCartney, M. Weyland, and P. A. Midgley, Ultramicroscopy ULTRD6 0304-3991 103, 67 (2005). 10.1016/j.ultramic.2004.11.018
- (2005) Ultramicroscopy , vol.103 , pp. 67
- Dunin-Borkowski, R.E.¹ Newcomb, S.B.² Kasama, T.³ McCartney, M.R.⁴ Weyland, M.⁵ Midgley, P.A.⁶

14
- 33746189796
- MIMIF7 1431-9276,. 10.1017/S1431927606060351
- M. G. Han, J. Li, Q. Xie, P. Fejes, J. Conner, B. Taylor, and M. R. McCartney, Microsc. Microanal. MIMIF7 1431-9276 12, 295 (2006). 10.1017/S1431927606060351
- (2006) Microsc. Microanal. , vol.12 , pp. 295
- Han, M.G.¹ Li, J.² Xie, Q.³ Fejes, P.⁴ Conner, J.⁵ Taylor, B.⁶ McCartney, M.R.⁷

15
- 24144454670
- MCRLAS 0026-2714,. 10.1016/j.microrel.2005.07.043
- U. Muehle, A. Lenk, R. Weiland, and H. Lichte, Microelectron. Reliab. MCRLAS 0026-2714 45, 1558 (2005). 10.1016/j.microrel.2005.07.043
- (2005) Microelectron. Reliab. , vol.45 , pp. 1558
- Muehle, U.¹ Lenk, A.² Weiland, R.³ Lichte, H.⁴

16
- 33646134596
- APPLAB 0003-6951,. 10.1063/1.2195109
- L. Xia, W. Wu, Y. Hao, Y. Wang, and J. Xu, Appl. Phys. Lett. APPLAB 0003-6951 88, 152108 (2006). 10.1063/1.2195109
- (2006) Appl. Phys. Lett. , vol.88 , pp. 152108
- Xia, L.¹ Wu, W.² Hao, Y.³ Wang, Y.⁴ Xu, J.⁵

17
- 0035051499
- ULTRD6 0304-3991,. 10.1016/S0304-3991(00)00096-6
- J. P. McCaffery, M. W. Phaneuf, and L. D. Madsen, Ultramicroscopy ULTRD6 0304-3991 87, 97 (2001). 10.1016/S0304-3991(00)00096-6
- (2001) Ultramicroscopy , vol.87 , pp. 97
- McCaffery, J.P.¹ Phaneuf, M.W.² Madsen, L.D.³

18
- 54749105097
- JAPIAU 0021-8979,. 10.1063/1.2982415
- D. Cooper, C. Ailliot, R. Truche, J.-P. Barnes, J.-M. Hartmann, and F. Bertin, J. Appl. Phys. JAPIAU 0021-8979 104, 064513 (2008). 10.1063/1.2982415
- (2008) J. Appl. Phys. , vol.104 , pp. 064513
- Cooper, D.¹ Ailliot, C.² Truche, R.³ Barnes, J.-P.⁴ Hartmann, J.-M.⁵ Bertin, F.⁶

19
- 0003521686
- (Springer, Berin).
- L. Reimer, Transmission Electron Microscopy (Springer, Berin, 1982).
- (1982) Transmission Electron Microscopy
- Reimer, L.¹

20
- 0003907198
- edited by E. Völkl, L. F. Allard, and D. C. Joy (Plenum, New York), Chaps..
- Introduction to Electron Holography, edited by, E. Völkl, L. F. Allard, and, D. C. Joy, (Plenum, New York, 1998), Chaps..
- (1998) Introduction to Electron Holography

21
- 4644297612
- ULTRD6 0304-3991,. 10.1016/j.ultramic.2004.04.003
- Y. Y. Wang, M. Kawasaki, J. Bruley, M. Gribelyuk, A. Domenicucci, and J. Gaudiello, Ultramicroscopy ULTRD6 0304-3991 101, 63 (2004). 10.1016/j.ultramic. 2004.04.003
- (2004) Ultramicroscopy , vol.101 , pp. 63
- Wang, Y.Y.¹ Kawasaki, M.² Bruley, J.³ Gribelyuk, M.⁴ Domenicucci, A.⁵ Gaudiello, J.⁶

22
- 32444434282
- APPLAB 0003-6951,. 10.1063/1.2172068
- D. Cooper, A. C. Twitchett, P. K. Somodi, P. A. Midgley, R. E. Dunin-Borkowski, I. Farrer, and D. A. Ritchie, Appl. Phys. Lett. APPLAB 0003-6951 88, 063510 (2006). 10.1063/1.2172068
- (2006) Appl. Phys. Lett. , vol.88 , pp. 063510
- Cooper, D.¹ Twitchett, A.C.² Somodi, P.K.³ Midgley, P.A.⁴ Dunin-Borkowski, R.E.⁵ Farrer, I.⁶ Ritchie, D.A.⁷

23
- 0442311014
- JCOMEL 0953-8984,. 10.1088/0953-8984/16/2/022
- P. Formanek and M. Kittler, J. Phys.: Condens. Matter JCOMEL 0953-8984 16, S193 (2004). 10.1088/0953-8984/16/2/022
- (2004) J. Phys.: Condens. Matter , vol.16 , pp. 193
- Formanek, P.¹ Kittler, M.²

24
- 0036415306
- MIMIF7 1431-9276,. 10.1017/S1431927602029938
- M. Lehmann, K. Brand, and H. Lichte, Microsc. Microanal. MIMIF7 1431-9276 8, 536 (2002). 10.1017/S1431927602029938
- (2002) Microsc. Microanal. , vol.8 , pp. 536
- Lehmann, M.¹ Brand, K.² Lichte, H.³

25
- 0003950343
- 2nd ed. (Wiley, New York).
- S. M. Sze, Physics of Semiconductors, 2nd ed. (Wiley, New York, 1981).
- (1981) Physics of Semiconductors
- Sze, S.M.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.