Dynamic surface profilometry and resonant-mode detection for microstructure characterization using nonconventional stroboscopic interferometry

IEEE Transactions on Industrial Electronics

Volumn 57, Issue 3, 2010, Pages 1120-1126

  Chen, Liang Chia ^a   Nguyen, Xuan Loc ^a   Huang, Hsin Sing ^a   Chen, Jin Liang ^b  

^a NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Dynamic profilometry; Microelectromechanical systems (MEMS); Resonant mode; Stroboscopic interferometry

Indexed keywords

CROSS-BRIDGE; DETECTION ACCURACY; DYNAMIC BEHAVIORS; DYNAMIC CHARACTERIZATION; DYNAMIC PROFILOMETRY; DYNAMIC SURFACE; EXCITATION SOURCES; FULL-FIELD; INNOVATIVE METHOD; MICRO BEAMS; MICROELECTROMECHANICAL SYSTEMS; MICROSTRUCTURE CHARACTERIZATION; MODE DETECTION; NANO SCALE; OUT-OF-PLANE; RESONANT MODE; STROBOSCOPIC INTERFEROMETRY; SURFACE PROFILOMETRY; VIBRATORY MODE;

INTERFEROMETERS; INTERFEROMETRY; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; OPTICAL MICROSCOPY; PROFILOMETRY;

COMPOSITE MICROMECHANICS;

EID: 76849099137     PISSN: 02780046     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIE.2009.2036645     Document Type: Article

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