Dynamic MEMS measurement using a strobed interferometric system with combined coherence sensing and phase information

Proceedings - International Conference on MEMS, NANO and Smart Systems, ICMENS 2003

Volumn , Issue , 2003, Pages 285-288

  Novak, E ^a   Wan, D S ^a   Unruh, P ^a   Schmit, J ^a  

^a Veeco Metrology   (United States)

Author keywords

Interference; Metrology; Microelectromechanical devices; Micromechanical devices; Microscopy; Millimeter wave devices; Phase measurement; Resonant frequency; Surfaces; Topology

Indexed keywords

DIGITAL STORAGE; MEASUREMENTS; MICROELECTROMECHANICAL DEVICES; MICROSCOPES; MICROSCOPIC EXAMINATION; MILLIMETER WAVES; NATURAL FREQUENCIES; PHASE MEASUREMENT; SURFACES; TOPOLOGY; UNITS OF MEASUREMENT; WAVE INTERFERENCE;

HARDWARE AND SOFTWARE; INTERFERENCE MICROSCOPES; INTERFEROMETRIC SYSTEM; MEMS MEASUREMENT; MICROMECHANICAL DEVICE; PHASE INFORMATION; RADII OF CURVATURE; TOPOGRAPHIC INFORMATION;

MILLIMETER WAVE DEVICES;

EID: 84943791553     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMENS.2003.1222010     Document Type: Conference Paper

References (5)

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3. th Annual Meeting, 2002.
4. J. Schmit, A. Olszak, "High-precision shape measurement by white-light interferometry with real-time scanner error correction," Appl. Opt. 41, pp 5943-5950, 2002.
5. R. Gutierrez, K. Shcheglov, T Tang; "Interferometric system for precision imaging of vibrating structures," US Patent 6,291,145, 2001.