Measurement system for full three-dimensional motion characterization of MEMS

Journal of Microelectromechanical Systems

Volumn 11, Issue 5, 2002, Pages 479-488

  Rembe, Christian ^b,c   Muller, Richard S ^a,b  

^a IEEE   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c POLYTEC GMBH   (Germany)

Author keywords

Design evaluation; Image processing; Interferometry; MEMS characterization; MEMS reliability; MEMS testing

Indexed keywords

MARKETABLE MICROELECTROMECHANICAL SYSTEMS; MICROELECTROMECHANICAL SYSTEM RELIABILITY; MICROELECTROMECHANICAL SYSTEM TESTING; MICROGYROSCOPE; MICROMIRROR ARRAY; STROBOSCOPIC IMAGING;

DYNAMICS; INTERFEROMETRY; MECHANICAL VARIABLES MEASUREMENT; MICROACTUATORS; MICROSTRUCTURE; RELIABILITY; STROBOSCOPES;

MICROELECTROMECHANICAL DEVICES;

EID: 0036772740     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2002.803285     Document Type: Article

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