Static and dynamic characterization of MEMS and MOEMS devices using optical interference microscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5455, Issue , 2004, Pages 429-435

  Grigg, D ^a   Felkel, E ^a   Roth, J ^a   De Lega, X Colonna ^a   Deck, L ^a   De Groot, P ^a  

^a ZYGO CORPORATION   (United States)

Author keywords

Interferometry; MEMS; Metrology; Microscopy; MOEMS; Stroboscopy; Thin films; White light

Indexed keywords

CHARACTERIZATION; INTERFEROMETERS; MEASUREMENTS; MICROSCOPIC EXAMINATION; PROFILOMETRY; STATIC ELECTRICITY; STROBOSCOPES; THIN FILM DEVICES;

MICRO ACTUATOR DEVICES; MICRO-MIRROR SWITCH ARRAY; OPTICAL INTERFERENCE MICRSCOPY; WHITE LIGHT;

MICROELECTROMECHANICAL DEVICES;

EID: 8844276861     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.546211     Document Type: Conference Paper

References (8)

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