Drive-mode control for vibrational MEMS gyroscopes

IEEE Transactions on Industrial Electronics

Volumn 56, Issue 4, 2009, Pages 956-963

  Dong, Lili ^a   Avanesian, David ^a,b  

^a Cleveland State University   (United States)

^b CLEVELAND STATE UNIVERSITY   (United States)

Author keywords

Analog implementation; Drive mode control; Micro electro mechanical systems (MEMS); Vibrational gyroscopes

Indexed keywords

ANALOG IMPLEMENTATION; COUPLING TERMS; DRIVE MODES; FIELD-PROGRAMMABLE ANALOG ARRAYS; HARDWARE IMPLEMENTATIONS; MECHANICAL SPRINGS; MECHANICAL-THERMAL NOISE; MEMS GYROSCOPES; MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS); MODE CONTROLLERS; NOVEL DESIGN METHODOLOGIES; OPEN LOOPS; PIEZO-ELECTRIC BEAMS; REFERENCE SIGNALS; SENSE MODES; STABILITY AND ROBUSTNESS; TRACKING ERRORS; VIBRATING MODES; VIBRATIONAL GYROSCOPES;

ANALOG CIRCUITS; COMPOSITE MICROMECHANICS; FREQUENCY DOMAIN ANALYSIS; GYROSCOPES; HARDWARE; MACHINE DESIGN; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES;

CONTROLLERS;

EID: 65549170097     PISSN: 02780046     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIE.2008.2010088     Document Type: Conference Paper

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