Property change in multifunctional TiCxOy thin films: Effect of the O/Ti ratio

Thin Solid Films

Volumn 515, Issue 3, 2006, Pages 866-871

  Fernandes, A C ^a   Carvalho, P ^a   Vaz, F ^a   Lanceros Mendez S ^a   Machado, A V ^a   Parreira, N M G ^b   Pierson, J F ^c   Martin, N ^d  

^a UNIVERSITY OF MINHO   (Portugal)

^b UNIVERSITY OF COIMBRA   (Portugal)

^c INSTITUT JEAN LAMOUR   (France)

^d Centre National de la Recherche Scientifique   (France)

Author keywords

FTIR; Resistivity; Sputtering; Structure; Titanium oxycarbide

Indexed keywords

CHARACTERIZATION; ELECTRIC CONDUCTIVITY; FILM GROWTH; MAGNETRON SPUTTERING; STRUCTURE (COMPOSITION); TITANIUM COMPOUNDS; X RAY DIFFRACTION;

ATOMIC RATIOS; COMPOSITION ANALYSIS; STRUCTURAL CHARACTERIZATION; TITANIUM OXYCARBIDE;

THIN FILMS;

EID: 33750438112     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.07.047     Document Type: Article

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