Study of formation and some properties of Ti-C:H films prepared by d.c. magnetron sputtering

Surface and Coatings Technology

Volumn 91, Issue 1-2, 1997, Pages 122-130

  Kulikovsky, V Yu ^a   Fendrych, F ^b   Jastrabik, L ^b   Chvostova, D ^b  

^a FRANTSEVICH INSTITUTE FOR PROBLEMS OF MATERIALS SCIENCE   (Ukraine)

^b INSTITUTE OF PHYSICS   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; DEPOSITION; HARDNESS; INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; PROTECTIVE COATINGS;

HARD FILMS; TITANIUM CARBON FILMS;

TITANIUM;

EID: 0031131210     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(96)03146-5     Document Type: Article

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