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Thin Solid Films

Volumn 473, Issue 2, 2005, Pages 252-258

Deposition and microstructure of Ti-containing diamond-like carbon nanocomposite films

(5) Yang, Won Jae a Sekino, Tohru b Shim, Kwang Bo a Niihara, Koichi b Auh, Keun Ho a

a Hanyang University (South Korea)

b OSAKA UNIVERSITY (Japan)

Author keywords

Diamond like carbon; Hardness; Metal organic precursor; Nanostructures

Indexed keywords

AMORPHOUS FILMS; GRAPHITIZATION; HARDNESS; INDUSTRIAL APPLICATIONS; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; ORGANOMETALLICS; PROTECTIVE COATINGS; RESIDUAL STRESSES; THERMODYNAMIC STABILITY; TITANIUM; TRANSMISSION ELECTRON MICROSCOPY; WEAR RESISTANCE; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON-BASED MATERIALS; METAL-ORGANIC PRECURSOR; NANOSCALE-GRADED COATINGS; NANOSTRUCTURED COATINGS;

DIAMOND LIKE CARBON FILMS;

EID: 10844239124 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2004.07.077 Document Type: Article

Times cited : (39)

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