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Volumn 9, Issue 3-6, 2000, Pages 715-721
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A superhard diamond-like carbon film
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Author keywords
Diamond like carbon; Doping elements; Hydrogen free; Superhard
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Indexed keywords
ADHESION;
AUGER ELECTRON SPECTROSCOPY;
CARBON;
DENSITY (SPECIFIC GRAVITY);
DEPOSITION;
DOPING (ADDITIVES);
ELECTRON ENERGY LOSS SPECTROSCOPY;
FRICTION;
MICROHARDNESS;
VICKERS HARDNESS TESTING;
WEAR OF MATERIALS;
X RAY PHOTOELECTRON SPECTROSCOPY;
DIAMOND-LIKE CARBON (DLC) FILMS;
KNOOP INDENTATION;
AMORPHOUS FILMS;
DIAMOND-LIKE CARBON;
FILM;
HARDNESS;
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EID: 0034048484
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(99)00344-1 Document Type: Conference Paper |
Times cited : (56)
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References (9)
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