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Volumn 15, Issue 10, 2006, Pages 1585-1592
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Humidity dependence on the friction and wear behavior of diamond-like carbon film in air and nitrogen environments
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Author keywords
DLC film; Friction and wear behavior; PECVD; Relative humidity
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Indexed keywords
ATMOSPHERIC HUMIDITY;
FRICTION;
HYDROLYSIS;
MORPHOLOGY;
NITROGEN;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
SCANNING ELECTRON MICROSCOPY;
SILICON WAFERS;
WEAR OF MATERIALS;
X RAY PHOTOELECTRON SPECTROSCOPY;
FRICTION AND WEAR BEHAVIOR;
FRICTION COEFFICIENT;
TRIBOCHEMICAL FILMS;
WEAR RATE;
DIAMOND LIKE CARBON FILMS;
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EID: 33748761194
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/j.diamond.2005.12.048 Document Type: Article |
Times cited : (57)
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References (34)
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