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Volumn 15, Issue 10, 2006, Pages 1585-1592

Humidity dependence on the friction and wear behavior of diamond-like carbon film in air and nitrogen environments

Author keywords

DLC film; Friction and wear behavior; PECVD; Relative humidity

Indexed keywords

ATMOSPHERIC HUMIDITY; FRICTION; HYDROLYSIS; MORPHOLOGY; NITROGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; WEAR OF MATERIALS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 33748761194     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.12.048     Document Type: Article
Times cited : (57)

References (34)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.