Nanotribological study of PECVD DLC and reactively sputtered Ti containing carbon films

Diamond and Related Materials

Volumn 15, Issue 10, 2006, Pages 1743-1752

  Kvasnica, S ^a   Schalko, J ^a   Eisenmenger Sittner, C ^a   Benardi, J ^a   Vorlaufer, G ^b   Pauschitz, A ^b   Roy, M ^c  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b AC2T RESEARCH GMBH   (Austria)

^c DEFENCE METALLURGICAL RESEARCH LABORATORY   (India)

Author keywords

Diamond like carbon coating; Friction force; Friction surfaces; MEMS; Nanotribology; Pull off force; Wear

Indexed keywords

DIAMOND LIKE CARBON FILMS; LUBRICATION; NANOTECHNOLOGY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS; TITANIUM;

FRICTION FORCE; FRICTION SURFACES; NANOTRIBOLOGY; PULL OFF FORCE;

TRIBOLOGY;

EID: 33748949048     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2006.03.005     Document Type: Article

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