Titanium-doped hydrogenated DLC coatings deposited by a novel OMCVD-PIIP technique

Surface and Coatings Technology

Volumn 167, Issue 1, 2003, Pages 11-15

  Peters, A M ^a   Nastasi, M ^a  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

Diamond like carbon; Nanoindentation; Organometallic CVD; Pin on disk; Plasma immersion ion implantation; Titanium carbonitride

Indexed keywords

DOPING (ADDITIVES); FILM GROWTH; HYDROGENATION; METALLORGANIC CHEMICAL VAPOR DEPOSITION; TITANIUM;

PRECURSORS;

DIAMOND LIKE CARBON FILMS;

COATING; DIAMOND-LIKE CARBON; HYDROGENATION; ION IMPLANTATION; PLASMA TREATMENT; TITANIUM; VAPOR DEPOSITION; WEAR RESISTANCE;

EID: 0037375587     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00886-1     Document Type: Article

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