Synthesis of diamondlike carbon films with superlow friction and wear properties

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 4 II, 2000, Pages 1987-1992

  Erdemir, A ^a   Eryilmaz, O L ^a,b   Fenske, G ^a  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b ISTANBUL TECHNICAL UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

FRICTION; SYNTHESIS (CHEMICAL); TRIBOLOGY; WEAR OF MATERIALS;

DIAMONDLIKE CARBON FILMS; SUPERFLOW FRICTION COEFFICIENT;

AMORPHOUS FILMS;

EID: 0034225656     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582459     Document Type: Article

References (38)

1. J. F. Braza and T. S. Sudarshan, Mater. Sci. Technol. 8, 574 (1992).
2. A. Matthews and S. S. Eskildsen, Diamond Relat. Mater. 3, 902 (1994).
3. S. Neuville and A. Matthews, MRS Bull. 22, 22 (1997).
4. C. Donnet, Surf. Coat. Technol. 100/101, 180 (1998).
5. H. Ronkainen, J. Koskinen, J. Likonen, S. Varjus, and J. Vihersalo, Diamond Relat. Mater. 3, 1329 (1993).
6. J. J. Cuomo, J. P. Doyle, J. Bruley, and J. C. Liu, Appl. Phys. Lett. 58, 1 (1991).
7. R. Wei, P. J. Wilbur, A. Erdemir, and F. M. Kustas, Surf. Coat. Technol. 51, 139 (1992).
8. A. A. Voevodin, M. S. Donley, and J. S. Zabinski, Surf. Coat. Technol. 92, 42 (1997).
9. H. Dimgen and C. P. Klages, Surf. Coat. Technol. 49, 543 (1991).
10. S. J. Harris, A. M. Weiner, and W.-J. Meng, Wear 211, 208 (1997).
11. B. Bhushan, Diamond Relat. Mater. 8, 1985 (1999).
12. A. Erdemir, M. Switala, R. Wei, and P. Wilbur, Surf. Coat. Technol. 50, 17 (1991).
13. C. Donnet and A. Grill, Surf. Coat. Technol. 94-95, 456 (1997).
14. A. Grill, V. Patel, and B. Meyerson, Surf. Coat. Technol. 49, 530 (1991).
15. J. Koskinen, D. Schneider, H. Ronkainen, T. Muukkonen, S. Varjus, P. Burck, K. Holmberg, and H.-J. Scheibe, Surf. Coat. Technol. 108-109, 385 (1998).
16. A. Erdemir, C. Bindal, G. R. Fenske, and P. Wilbur, Tribol. Trans. 39, 735 (1996).
17. C. Donnet, M. Belin, J. C. Martin, J. M. Martin, A. Grill, and V. Patel, Surf. Coat. Technol. 68-69, 626 (1994).
18. C. Donnet, T. Le Mogne, L. Ponsonnet, M. Belin, A. Grill, V. Patel, and C. Jahnes 4 (1998) 259.
19. D. S. Kim, T. E. Fischer, and B. Gallois, Surf. Coat. Technol. 49, 537 (1991).
20. K. Holmberg, J. Koskinen, H. Ronkainen, J. Vihersalo, J. P. Hirvonen, and J. Likonen, Diamond Films Technol. 4, 113 (1994).
21. A. Erdemir and G. R. Fenske, Tribol. Trans. 39, 787 (1996).
22. A. Erdemir, G. R. Fenske, J. Terry, and P. Wilbur, Surf. Coat. Technol. 94-95, 525 (1997).
23. A. Erdemir, I. B. Nilufer, O. L. Eryilmaz, M. Beschliesser, and G. Fenske, Surf. Coat. Technol. 120-121, 589 (1999).
24. D. S. Knight and W. B. White, J. Mater. Res. 4, 385 (1989).
25. M. A. Tamor and W. C. Vassell, J. Appl. Phys. 76, 3823 (1994).
26. Y. Liu, A. Erdemir, and E. I. Meletis, Surf. Coat. Technol. 82, 48 (1996).
27. A. Erdemir, M. Halter, G. R. Fenske, C. Zuiker, R. Csencsits, A. R. Krauss, and D. M. Gruen, Tribol. Trans. 40, 667 (1997).
28. A. Erdemir, C. Bindal, and C. Zuiker, Surf. Coat. Technol. 86-87, 692 (1996).
29. A. Erdemir, F. A. Nichols, X. Z. Pan, R. Wei, and P. Wilbur, Diamond Relat. Mater. 3, 119 (1993).
30. I. P. Hayward, I. L. Singer, and L. E. Seitzman, Wear 157, 215 (1992).
31. A. Erdemir, M. Halter, G. R. Fenske, A. Krauss, D. M. Gruen, S. M. Pimenov, and V. I. Konov, Surf. Coat. Technol. 94-96, 537 (1997).
32. K. Miyoshi, R. L. C. Wu, A. Garscadden, P. N. Barnes, and H. E. Jackson, J. Appl. Phys. 74, 4446 (1993).
33. S. V. Pepper, J. Vac. Sci. Technol. 20, 643 (1982).
34. F. P. Bowden and J. E. Young, Proc. R. Soc. London 208, 444 (1951).
35. F. P. Bowden and A. E. Hanwell, Proc. R. Soc. London, Ser. A 295, 233 (1966).
36. M. Dugger, D. Peebles, and L. Pope, ACS Symp. Ser. 485, 72 (1992).
37. T. E. Derry, C. C. P. Madiba, and J. P. F. Sellschop, Nucl. Instrum. Methods Phys., 218, 559 (1993).
38. S. J. Harris and G. D. Goodwin, J. Phys. Chem. Res. B 97, 23 (1993).