Structure of silicon/oxide and nitride/oxide interfaces

Physics-Uspekhi

Volumn 52, Issue 9, 2009, Pages 869-877

  Gritsenko, Vladimir A ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC STRUCTURE; SILICON DEVICES;

SILICON COMPOUNDS; SILICON OXIDES;

CRYSTAL ATOMIC STRUCTURE;

EID: 76149089186     PISSN: 10637869     EISSN: None     Source Type: Journal    
DOI: 10.3367/UFNe.0179.200909a.0921     Document Type: Article

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