A microcantilever heater-thermometer with a thermal isolation layer for making thermal nanotopography measurements

Nanotechnology

Volumn 21, Issue 5, 2010, Pages

  Dai, Zhenting ^a   Corbin, Elise A ^a   King, William P ^a  

^a United States of America   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

A-THERMAL; CANTILEVER FABRICATION; HEATING POWER; ISOLATION STRUCTURES; MICRO-CANTILEVERS; MICROCANTILEVER HEATER; MICROSCALE HEATER; NANOTOPOGRAPHIES; PERFORMANCE CHARACTERISTICS; SINGLE CRYSTAL SILICON; THERMAL ISOLATION STRUCTURE;

ATOMIC FORCE MICROSCOPY; COMPOSITE MICROMECHANICS; CRYSTAL STRUCTURE; NANOCANTILEVERS; NANOTECHNOLOGY; SILICON NITRIDE; SINGLE CRYSTALS; TEMPERATURE SENSORS; THERMOMETERS;

SILICON WAFERS;

EID: 75249088156     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/21/5/055503     Document Type: Article

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