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Volumn 48, Issue 12, 2009, Pages

Epitaxial ZnO thin films on a-plane sapphire substrates grown by ultrasonic spray-assisted mist chemical vapor deposition

(4) Nishinaka, Hiroyuki a Kamada, Yudai a Kameyama, Naoki a Fujita, Shizuo a

a KYOTO UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

A-PLANE SAPPHIRE; BAND EDGE; C-AXIS ORIENTATIONS; CVD PROCESS; DEEP LEVEL; ELECTRICAL PROPERTY; HIGH QUALITY; LOW TEMPERATURES; ROOM TEMPERATURE; ROTATIONAL DOMAINS; ULTRASONIC SPRAY; ZNO; ZNO BUFFER LAYER; ZNO LAYERS; ZNO THIN FILM;

BUFFER LAYERS; DEPOSITION; ELECTRIC PROPERTIES; EPITAXIAL FILMS; METALLIC FILMS; OPTICAL FILMS; SAPPHIRE; ULTRASONICS; ZINC OXIDE;

CHEMICAL VAPOR DEPOSITION;

EID: 75149179964 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.48.121103 Document Type: Article

Times cited : (44)

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