Low-temperature growth of ZnO thin films by linear source ultrasonic spray chemical vapor deposition

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 10 A, 2007, Pages 6811-6813

  Nishinara, Hiroyuki ^a   Kawaharamura, Toshiyuki ^a   Fujita, Shizuo ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Chemical vapor deposition; Flexible substrates; Low temperature growth; Ultrasonic spray; Zinc oxide

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FILM GROWTH; LOW TEMPERATURE EFFECTS; METHANOL; POLYIMIDES; ULTRASONIC EFFECTS; ZINC OXIDE;

FLEXIBLE SUBSTRATES; LOW TEMPERATURE GROWTH; ULTRASONIC SPRAY; ZNO FILMS;

THIN FILMS;

EID: 35348889516     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.6811     Document Type: Article

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