MBE growth of ZnO layers on sapphire employing hydrogen peroxide as an oxidant

Journal of Crystal Growth

Volumn 287, Issue 1, 2006, Pages 7-11

  Bakin, A ^a   El Shaer, A ^a   Mofor, A Che ^a   Kreye, M ^a   Waag, A ^a   Bertram, F ^b   Christen, J ^b   Heuken, M ^c   Stoimenos, J ^d  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b OTTO VON GUERICKE UNIVERSITY   (Germany)

^c AIXTRON AG   (Germany)

^d ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

A3. Molecular beam epitaxy; B1. Oxides; B2. Semiconducting materials

Indexed keywords

EPITAXIAL GROWTH; HYDROGEN PEROXIDE; OXIDES; SCANNING ELECTRON MICROSCOPY; SURFACE PROPERTIES; TRANSMISSION ELECTRON MICROSCOPY; ZINC OXIDE;

LATERAL UNIFORMITY; ROCKING CURVE; SEMICONDUCTING MATERIALS; STRUCTURAL PROPERTIES;

MOLECULAR BEAM EPITAXY;

EID: 29844435490     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2005.10.033     Document Type: Article

References (17)

1. S. Bethke, H. Pan, and B.W. Wessels Appl. Phys. Lett. 52 1998 138
2. R.D. Vispute, V. Talyansky, Z. Trajanovic, S. Choopun, M. Downes, R.P. Sharma, M.C. Woods, R.T. Lareau, K.A. Jones, and A.A. Iliadis Appl. Phys. Lett. 70 1997 2735
3. M.W. Cho, A. Setiawan, H.J. Ko, S.K. Hong, and T. Yao Semicond. Sci. Technol. 20 2005 S13 S21
4. T. Ohgaki, N. Ohashi, H. Kakemoto, S. Wada, Y. Adachi, H. Haneda, and T. Tsurumi J. Appl. Phys. 93 2003 1961
5. Y. Chen, D.M. Bagnall, H.-J. Koh, K.-T. Park, K. Hiraga, Z.-Q. Zhu, and T. Yao J. Appl. Phys. 84 1998 3912
6. M.A.L. Johnson, S. Fujita, W.H. Rowland Jr., W.C. Hughes, J.W. Cook Jr., and J.F. Schetzina J. Electron. Mater. 25 1996 855
7. Y. Chen, D.M. Bagnall, H.-J. Koh, K.-T. Park, K. Hiraga, Z. Zhu, and T. Yao J. Appl. Phys. 84 1998 3912
8. P. Fons, K. Iwata, S. Niki, A. Yamada, and K. Matsubara J. Crystal Growth 201/202 1999 627
9. F. Vigué, P. Vennéguès, S. Vézian, M. Laügt, and J.-P. Faurie Appl. Phys. Lett. 79 2001 194
10. K. Miyamoto, M. sano, H. Kato, and T. Yao J. Crystal Growth 265 2004 34
11. CRC Handbook of Chemistry and Physics 79th ed. 1998-1999 CRC Press Boca Raton
12. K. Nakahara, T. Tanabe, H. Takasu, P. Fons, K. Iwata, A. Yamada, K. Matsubara, R. Hunger, and S. Niki Jpn. J. Appl. Phys. 40 2000 250
13. M. Fujita, N. Kawamoto, T. Tatsumi, K. Yamagishi, and Y. Horikoshi Jpn. J. Appl. Phys. 42 2003 67
14. H.-B. Kang, K. Nakamura, S.-H. Lim, and D. Shindo Jpn. J. Appl. Phys. Part 1 37 1998 781
15. H.-B. Kang, K. Nakamura, K. Yoshida, and K. ishikawa Jpn. J. Appl. Phys. Part 2 36 1997 L933
16. N. Izyumskaya, V. Avrutin, W. Schoch, A. El-Shaer, F. Reuss, Th. Gruber, and A. Waag J. Crystal Growth 269 2004 356
17. A. El-Shaer, A.C. Mofor, A. Bakin, M. Kreye, and A. Waag High-quality ZnO layers grown by MBE on Sapphire J. Superlattice. Microstr. 38 4-6 2005 265 271