Si nanocrystal synthesis in HfO2/SiO/HfO2 multilayer structures

Nanotechnology

Volumn 21, Issue 5, 2010, Pages

  Perego, M ^a   Seguini, G ^a   Wiemer, C ^a   Fanciulli, M ^a,b   Coulon, P E ^c   Bonafos, C ^c  

^a LABORATORIO MDM   (Italy)

^b UNIVERSITY OF MILANO BICOCCA   (Italy)

^c CEMES CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

HIGH TEMPERATURE; LIMITING FACTORS; MATRIX; MULTILAYER STRUCTURES; NITROGEN ATMOSPHERES; OUT-DIFFUSION; SI NANOCRYSTAL; THERMAL TREATMENT; TWO-DIMENSIONAL ARRAYS;

HAFNIUM COMPOUNDS; HEAT TREATMENT; MULTILAYERS; SILICON; SILICON COMPOUNDS; SILICON OXIDES;

NANOCRYSTALS;

EID: 73949148712     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/21/5/055606     Document Type: Article

References (26)

1. Kim D-W, Kim T and Banerjee S K 2003 IEEE Trans. Electron Devices 50 1823
2. Chen J H, Wang Y Q, Yoo W Y, Yeo Y C, Samudra G, Chan DSH, Du A Y and Kwong D-L 2004 IEEE Trans. Electron Devices 51 1840
3. Monzio Compagnoni C, Ielmini D, Spinelli A S and Lacaita AL 2005 IEEE Trans. Electron Devices 52 569
4. Monzio Compagnoni C, Ielmini D, Spinelli A S and Lacaita AL 2005 IEEE Trans. Electron Devices 52 2473
5. Kapetanakis E, Normand P, Tsoukalas D and Beltios K 2002 Appl. Phys. Lett. 80 2794
6. Bonafos C et al 2004 J. Appl. Phys. 95 5696
7. Nakajima A, Sugita Y, Kawamura K, Tomita H and Yokoyama N 1996 J. Appl. Phys. 80 4006
8. Kanjilal A, Lundsgaard Hansen J, Gaiduk P, Nylandsted Larsen A, Cherkashin N, Claverie A, Normand P, Kapelanakis E, Skarlatos D and Tsoukalas D 2003 Appl. Phys. Lett. 82 1212
9. Zacharias M, Heitmann J, Scholz R, Kahler U, Schmidt M and Blasing J 2002 Appl. Phys. Lett. 80 661
10. Perego M, Fanciulli M, Spiga S, Bonafos C and Cherkashin N 2006 Mater. Sci. Eng. C 26 835
11. Fanciulli M, Perego M, Bonafos C, Mouti A, Schamm S and Benassayag G 2006 Adv. Sci. Technol. 51 156
12. Mathiot D, Schunck J P, Perego M, Fanciulli M, Normand P and Tsoukalas D 2003 J. Appl. Phys. 94 2136
13. Perego M, Ferrari S, Spiga S, Bonera E and Fanciulli M 2003 Appl. Phys Lett. 82 121
14. Perego M, Ferrari S, Fanciulli M, Ben Assayag G, Bonafos C, Carrada M and Claverie A 2004 J. Appl. Phys. 95 257
15. Perego M, Ferrari S, Fanciulli M, Ben Assayag G, Bonafos C, Carrada M and Claverie A 2004 Appl. Surf. Sci. 231/232C 813
16. Ferrari S and Fanciulli M 2006 J. Phys. Chem. B 110 14905
17. Chang H S, Hwang H, Cho M, Kim H H and Moon D W 2004 J. Vac. Sci. Technol. A 22 165
18. Shin D and Liu Z-K 2007 Scr. Mater. 57 201
19. Hoshino Y, Kido Y, Yamamoto K, Hayashi S and Niwa M 2002 Appl. Phys Lett. 81 2650
20. Liu C-L, Stoker M, Hegde R I, Rai R S and Tobin P J 2002 MRS Symp. Proc. 731 W5.2
21. Lopez C M and Irene E A 2007 J. Appl. Phys. 99 024101
22. Wiemer C, Ferrari S, Fanciulli M, Pavia G and Lutterotti L 2004 Thin Solid Film 450 134
23. Stemmer S 2004 J. Vac. Sci. Technol. B 2 791
24. Massalski T B (ed) 1986 Binary Alloy Phase Diagrams (Metals Park, OH: American Society for Metals)
25. Alessandri M, Piagge R, Caniatti M, Del Vitto A, Wiemer C, Pavia G, Alberici S, Bellandi E and Nale A 2006 ECS Trans. 3 183
26. Takahashi T, Fukatsu S, Itoh K M, Uematsu M, Fujiwara A, Kageshima H, Takahashi Y and Shiraishi K 2003 J. Appl. Phys. 93 3674