Phase stability of hafnium oxide and zirconium oxide on silicon substrate

Scripta Materialia

Volumn 57, Issue 3, 2007, Pages 201-204

  Shin, Dongwon ^a   Liu, Zi Kui ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

CALPHAD; First principles electron theory; Silicides; Thermodynamics; Thin films

Indexed keywords

PHASE DIAGRAMS; PHASE STABILITY; SILICIDES; SILICON; THERMODYNAMICS; THIN FILMS; ZIRCONIA;

BINARY OXIDES; FIRST PRINCIPLES ELECTRON THEORY; HAFNIUM OXIDES; THERMODYNAMIC DESCRIPTIONS;

HAFNIUM COMPOUNDS;

EID: 34248645441     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.scriptamat.2007.04.011     Document Type: Article

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