Synthesis of mono and bi-layer of Si nanocrystals embedded in a dielectric matrix by e-beam evaporation of SiO/SiO2 thin films

Materials Science and Engineering C

Volumn 26, Issue 5-7, 2006, Pages 835-839

  Perego, M ^a   Fanciulli, M ^a   Bonafos, C ^b   Cherkashin, N ^b  

^a LABORATORIO MDM   (Italy)

^b CEMES CNRS   (France)

Author keywords

e beam evaporation; Germanium nanocrystals; Non volatile memory; Silicon nanocrystals

Indexed keywords

DIELECTRIC MATERIALS; HEAT TREATMENT; MASS SPECTROMETRY; SILICA; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

E-BEAM EVAPORATION; GERMANIUM NANOCRYSTALS; NON-VOLATILE MEMORY; SILICON NANOCRYSTALS;

NANOSTRUCTURED MATERIALS;

EID: 33646836271     PISSN: 09284931     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msec.2005.09.058     Document Type: Article

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