Thin AlN film resonators utilizing the lowest order symmetric Lamb mode: Further developments

Proceedings of the IEEE International Frequency Control Symposium and Exposition

Volumn , Issue , 2007, Pages 1067-1072

  Yantchev, V ^a   Katardjiev, I ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE VELOCITY; ACOUSTIC WAVES; ACOUSTICS; ALUMINA; ALUMINUM COMPOUNDS; ELASTIC WAVES; NITRIDES; PORTS AND HARBORS; SOLIDS; THICK FILMS; THIN FILM DEVICES; THIN FILMS;

EUROPEAN; FREQUENCY CONTROLS; STOP BANDS;

ACOUSTIC RESONATORS;

EID: 51249109747     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2007.4319243     Document Type: Conference Paper

References (17)

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