Design and fabrication of a miniaturized bulk acoustic filter by high aspect ratio etching

Journal of Microlithography, Microfabrication and Microsystems

Volumn 4, Issue 3, 2005, Pages

  Lin, Chung Hsien ^a   Chen, Hong Ren ^b   Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b ASIA PACIFIC MICROSYSTEMS INC   (Taiwan)

Author keywords

Bulk acoustic device; Inductive coupling plasma; MEMS resonator

Indexed keywords

ASPECT RATIO; BANDWIDTH; INDUCTIVELY COUPLED PLASMA; PLASMA ETCHING; RESONATORS; THIN FILMS;

BULK ACOUSTIC DEVICE; FILM BULK ACOUSTIC WAVE RESONATOR (FBAR); INSERTION LOSS; MICRO ELECTROMECHANICAL RESONATORS;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 33644758572     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.2037387     Document Type: Article

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