A MEMS actuator for integrated carbon nanotube strain sensing

Proceedings of IEEE Sensors

Volumn 2005, Issue , 2005, Pages 93-96

  Jungen, Alain ^a   Meder, Carsten ^a   Tonteling, Marc ^a   Stampfer, Christoph ^a   Linderman, Ryan ^a   Hierold, Christofer ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBES; ELECTRIC PROPERTIES; MICROELECTROMECHANICAL DEVICES; RELIABILITY; SCANNING ELECTRON MICROSCOPY; STRAIN MEASUREMENT; TENSILE STRESS;

ELECTROTHERMAL ACTUATORS; RAMAN MICROSCOPY; TENSILE LOAD;

MICROACTUATORS;

EID: 33847283433     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2005.1597644     Document Type: Conference Paper

References (7)

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