Study on contamination control in a minienvironment inside clean room for yield enhancement based on particle concentration measurement and airflow CFD simulation

Building and Environment

Volumn 45, Issue 4, 2010, Pages 825-831

  Noh, Kwang Chul ^a   Kim, Hyuk Soon ^b   Oh, Myung Do ^b  

^a Yonsei University   (South Korea)

^b University of Seoul   (South Korea)

Author keywords

Clean room; Contamination control; Fan filter unit (FFU); Minienvironment; Particle; Yield enhancement

Indexed keywords

CONTAMINATION CONTROL; FAN FILTER; MINIENVIRONMENT; PARTICLE; YIELD ENHANCEMENT;

CLEAN ROOMS; CONCENTRATION (PROCESS); IMPURITIES; INDOOR AIR POLLUTION; SIMULATORS;

CONTAMINATION;

AIRFLOW; COMPUTATIONAL FLUID DYNAMICS; COMPUTER SIMULATION; INDOOR AIR; POLLUTANT SOURCE; POLLUTION CONTROL;

ASIA; EURASIA; FAR EAST; KOREA;

EID: 71649103787     PISSN: 03601323     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.buildenv.2009.09.001     Document Type: Article

References (22)

1. Whyte W. Cleanroom technology: fundamentals of design, testing and operation (2001), John Wiley and Sons, Chichester
2. Shih Y.H., Huang S.H., Lia S.N., Chen S.C., and Tsai C.J. Simulation and testing of pollutant dispersion during preventive maintenance in a cleanroom. Building and Environment 44 12 (2009) 2319-2326
3. Noh K.C., Lee S.C., and Oh M.D. A numerical study on airflow and dynamic cross-contamination in the super cleanroom for photolithography process. Building and Environment 40 (2005) 1431-1440
4. Yang L., and Gan C.E. Costing small cleanrooms. Building and Environment 42 (2007) 743-751
5. International Organization for Standardization (ISO). ISO 14644-7, cleanrooms and associate controlled environments-part 7: separation devices (clean air hoods, glove boxes, isolators and minienvironments); 2004.
6. Xu T. Characteristics of minienvironments in a clean room: design characteristics and environmental performance. Building and Environment 42 (2007) 2993-3000
7. Xu T. Characterization of minienvironments in a cleanroom: assessing energy performance and its implications. Building and Environment 43 (2008) 1545-1552
8. Xu T. A study on the operation performance of a minienvironment system. Journal of the IEST 49 1 (2006) 63-71
9. Zhu SB. Study of airborne molecular contamination in minienvironments. IEEE/SEMI Advanced semiconductor manufacturing conference; 2002, p. 309-13.
10. Hu S.C., and Wu T.M. Experimental study of airflow and particle characteristics of a 300-mm FOUP/LPU minienvironment system. IEEE Transactions on Semiconductor Manufacturing 16 (2003) 660-667
11. Chuah Y.K., Tasi C.H., and Hu S.C. Simultaneous control of particle contaminants and VOC pollution under different operating conditions of a mini-environment that contains a coating process. Building and Environment 35 (2000) 91-99
12. Kobayashi Y., Kobayashi S., Tokunaga K., Kato K., and Minami T. Particle characteristics of 300-mm minienvironment (FOUP and LPU). IEEE Transactions on Semiconductor Manufacturing 13 (2000) 259-263
13. Hu S.C., Chuah Y.K., and Yen M.C. Design and evaluation of a minienvironment for semiconductor manufacture process. Building and Environment 37 (2002) 201-208
14. Noh K.C., Lee H.C., Park J., and Oh M.D. Study on evaluation and prediction of cleanliness level inside the mini-environment using local mean air-age and effective flow rate. IEEE Transactions on Semiconductor Manufacturing 21 2 (2008) 297-304
15. Tannous G. Optimization of a minienvironment design using computational fluid dynamics. Journal of the IEST 40 1 (1997) 29-34
16. Shiu H.R., Huang H.Y., Chen S.L., and Ke M.T. Numerical simulation for air flow in mini-environment and SMIF enclosure. IEEE Transactions on Semiconductor Manufacturing 16 (2003) 60-67
17. Chen J.J., Lan C.H., and Jeng M.S. The development of fan filter unit with flowrate feedback control in a cleanroom. Building and Environment 42 10 (2007) 3556-3561
18. Xu T., Lan C.H., and Jeng M.S. Performance of large fan-filter units for cleanroom applications. Building and Environment 42 6 (2007) 2299-2304
19. Xu T. An innovative method for dynamic characterization of fan filter unit operation. Journal of the IEST 50 2 (2007) 85-97
20. Reist P.C. Aerosol science and technology. 2nd ed. (1993), McGraw-Hill, Singapore
21. Patankar SV. Numerical heat transfer and fluid flow, hemisphere, Washington DC; 1980.
22. International Organization for Standardization (ISO). ISO 14644-1, cleanrooms and associate controlled environments-part 1: classification of air cleanliness; 1999.