Optimization of a Minienvironment Design Using Computational Fluid Dynamics

Journal of the IEST

Volumn 40, Issue 1, 1997, Pages 29-34

  Tannous, A George ^a  

^a Asyst Technologies Inc   (United States)

Author keywords

Computational fluid dynamics (CFD); Contamination control; Flow simulation; Minienvironment; Tool integrated minienvironment

Indexed keywords

AIR QUALITY; CLEAN ROOMS; COMPUTATIONAL FLUID DYNAMICS; CONTAMINATION; FINITE VOLUME METHOD; FLOW OF FLUIDS; GEOMETRY; MATHEMATICAL MODELS; OPTIMIZATION; PRESSURE; SEMICONDUCTOR DEVICE MANUFACTURE;

AIR RECIRCULATION ZONES; AIR VELOCITY FIELD; MINIENVIRONMENT DESIGN; POSITIVE DIFFERENTIAL PRESSURE; PRESSURE DISTRIBUTION; SEMICONDUCTOR INDUSTRY; WAFER PROCESS TOOL;

ENVIRONMENTAL ENGINEERING;

EID: 0030646807     PISSN: 10984321     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)

1. Abuzeid, Salem, "Total Contamination Control: The Minienvironment Era," Proceedings of the Seventeenth International Electronics Manufacturing Technology Symposium, Austin Texas (Oct. 2-4, 1995).
2. Rappa, Michael, "Factors Influencing the Rate of Adoption of Minienvironment Technology in the United States, Japan, Korea and Taiwan," Proceedings of the 12th International Symposium on Contamination Control, pp. 503-507, Yokohama, Japan (October 10-14, 1994).
3. Shu, Chin-Yung, "The Impact of the Minienvironment on Fab Capacity and Yield," Proceedings of the 41st Annual Technical Meeting of the Institute of Environmental Sciences, pp. 118-123, Anaheim, California (April 30-May 5, 1995).
4. Gath, A. Honold, and Simon, R., "Minienvironment Requirements from Next Generation IC Technology," Proceedings of the Microcontamination Conference, pp. 278-306, San Jose, California (September 21-23, 1993).
5. Holzel, Robert, "Minienvironment Systems, Current Performance and outlook," Proceedings of the Microcontamination Conference, pp. 278-287, San Jose, California (September 21-23, 1993).
6. Lee, J.H., Kim, J.H., Park, M.S., and Shim, O.J., "3-Dimensional Flow Characteristics in a Clean Room after Divisional Filter Exchange," Proceedings of the 12th International Symposium on Contamination Control, pp. 209-214, Yokohama, Japan (October 10-14, 1994).
7. White, P., MacGibbon, B., and Busnaina, A., Proceedings of the Microcontamination Conference, pp. 688-691, San Jose, California (September 21-23, 1993).
8. Patankar, Suhas V., Numerical Heat Transfer and Fluid Flow, Hemisphere, Washington D.C.