Characterization of minienvironments in a cleanroom: Assessing energy performance and its implications

Building and Environment

Volumn 43, Issue 9, 2008, Pages 1545-1552

  Xu, Tengfang ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Airflow; Cleanliness; Cleanroom; Contamination control; Electric power demand; Electric power density; Energy; Energy performance index; Fan filter unit; Minienvironment

Indexed keywords

AIR; ELECTRIC POWER DISTRIBUTION; ENERGY CONSERVATION; FANS; POLLUTION CONTROL;

AIRFLOW; CONTAMINATION CONTROL; ELECTRIC POWER DEMAND; ELECTRIC POWER DENSITY; ENERGY PERFORMANCE INDEX; FAN-FILTER UNIT; MINIENVIRONMENT;

CLEAN ROOMS;

AIR; CLEAN ROOMS; ELECTRIC POWER DISTRIBUTION; ENERGY CONSERVATION; FANS; POLLUTION CONTROL;

AIRFLOW; COMPARATIVE STUDY; ELECTRICAL POWER; OPTIMIZATION; PERFORMANCE ASSESSMENT; VENTILATION;

EID: 43949143187     PISSN: 03601323     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.buildenv.2007.09.003     Document Type: Article

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