Experimental study of airflow and particle characteristics of a 300-mm POUP/LPU minienvironment system

IEEE Transactions on Semiconductor Manufacturing

Volumn 16, Issue 4, 2003, Pages 660-667

  Hu, Shih Cheng ^a   Wu, Tzong Ming ^b  

^a NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Contamination control; Front opening unified pod (FOUP); Load port unit (LPU); Minienvironment

Indexed keywords

ANEMOMETERS; CONTAMINATION; FLOW OF FLUIDS; PARTICLE SIZE ANALYSIS; SILICON WAFERS; THREE DIMENSIONAL; ULTRASONIC DEVICES;

AIRFLOW; CONTAMINATION CONTROL; FRONT OPENING UNIFIED MODEL; LOAD PORT UNIT; MINIENVIRONMENT SYSTEM; THREE DIMENSIONAL ULTRASONIC ANEMOMETER;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0344896827     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2003.818957     Document Type: Article

References (8)

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5. Y. Kobayashi, S. Kobayashi, K. Tokunaga, K. Kato, and T. Minami, "Particle characteristics of 300-mm minienvironment (FOUP and LPU)," IEEE Trans. Semiconduct. Manufact., vol. 13, pp. 259-263, Aug. 2000.
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