A numerical study on airflow and dynamic cross-contamination in the super cleanroom for photolithography process

Building and Environment

Volumn 40, Issue 11, 2005, Pages 1431-1440

  Noh, Kwang Chul ^a   Oh, Myung Do ^a   Lee, Seung Chul ^b  

^a University of Seoul   (South Korea)

^b Samcheok National University   (South Korea)

Author keywords

Cleanroom; Deflection angle; Dynamic cross contamination; Nonuniformity

Indexed keywords

AIR; ANGLE MEASUREMENT; CLEAN ROOMS; CONTAMINATION; DAMPING; DEFLECTION (STRUCTURES); NUMERICAL ANALYSIS; NUMERICAL METHODS; POROSITY;

AIRFLOW; CROSS CONTAMINATION; DAMPERS;

PHOTOLITHOGRAPHY;

AIRFLOW; INDOOR AIR;

EID: 21844431606     PISSN: 03601323     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.buildenv.2004.11.016     Document Type: Article

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