A study on the operation performance of a minienvironment system

Journal of the IEST

Volumn 49, Issue 1, 2006, Pages 63-71

  Xu, Tengfang ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Airflow; Cleanroom; Electric power; Energy performance index; Minienvironment; Pressure control; Separative devices

Indexed keywords

CLEAN ROOMS; ENERGY CONSERVATION; ENERGY EFFICIENCY; LABORATORIES; POWER QUALITY; PRESSURE CONTROL;

AIRFLOW; ELECTRIC POWER; ENERGY PERFORMANCE INDICES; MINIENVIRONMENT; SEPARATIVE DEVICES;

ELECTRIC POWER SYSTEM CONTROL;

EID: 33947610784     PISSN: 10984321     EISSN: None     Source Type: Journal    
DOI: 10.17764/jiet.49.1.7k8137171w0h5mnp     Document Type: Article

References (14)

1. Xu, T. 2005. Investigating the Performance of a Minienvironment System. Proceedings of the Institute of Environmental Sciences and Technology. Rolling Meadows, IL: Institute of Environmental Sciences and Technology.
2. Xu, T. 2003. Performance Evaluation of Cleanroom Environmental Systems. Journal of the IEST 46: 66-73.
3. Xu, T. 2004. Considerations for efficient airflow design in cleanrooms. Journal of the IEST 47: 24-28.
4. Rappa, M. 1994. Factors Influencing the Rate of Adoption of Minienvironment Technology in United States, Japan, Korea, and Taiwan. Proceedings of the 12th International Symposium on Contamination Control. The Netherlands: ICCCS. International SEMATECH. 1999. Integrated Minienvironment Design Best Practices, Technology Transfer #99033693A-ENG. Austin, TX: International SEMATECH, Inc.
5. Tannous, G. 1997. Optimization of a minienvironment design using computational fluid dynamics. Journal of the IEST 40 (1): 29-34.
6. Rothman, L., R. Miller, R. Wang, T. Baechle, S. Silverman, and D. Cooper. 1995. SEMATECH minienvironment benchmarking project. Journal of the IEST 38 (3): 36-41.
7. Xu, T. 2005. Opportunities for Sustainable Design and Operation of Clean Spaces: A Case Study on Minienvironment System Performance. Lawrence Berkeley National Laboratory Final Report LBNL 56312.
8. Berkeley, CA: LBNL ISO Standard 14644-1. 1999. Cleanrooms and associated controlled environments-Part 1: Classification of air cleanliness. International Organization for Standardization (ISO).
9. ISO Standard 14644-4. 2001. Cleanrooms and associated controlled environments-Part 4: Design, construction and start-up. International Organization for Standardization (ISO).
10. ISO Standard 14644-7. 2004. Cleanrooms and associated controlled environments-Part 7: Separative devices (clean air hoods, gloveboxes, isolators, minienvironments). International Organization for Standardization (ISO).
11. Olim, M. 1998. Optimizing Minienvironment Air Flow Patterns Using CFD. Semiconductor International. IEST-RP-CC028.1. 2002. Minienvironments. Rolling Meadows, IL: Institute of Environmental Sciences and Technology.
12. ISO Standard 14644-3. 2002. Cleanrooms and associated controlled environments-Part 3: Test methods. International Organization for Standardization (ISO).
13. Shu, S. 1995. The Impact of Minienvironment of Fab Capacity and Yield. Proceedings of the Institute of Environmental Sciences and Technology. Rolling Meadows, IL: Institute of Environmental Sciences and Technology.
14. Tannous, G. 1996. Air Flow Simulation in a Minienvironment. Solid State Technology July: 201-7.