Prediction and evaluation of cleanliness levels inside a mini-environment by measuring mean air-age and effective flow rate

IEEE Transactions on Semiconductor Manufacturing

Volumn 21, Issue 2, 2008, Pages 297-304

  Noh, Kwang Chul ^a   Lee, Hyeon Cheol ^b   Park, Jung Il ^b   Oh, Myung Do ^c  

^a Yonsei University   (South Korea)

^b Samsung Electro Mechanics   (South Korea)

^c University of Seoul   (South Korea)

Author keywords

Cleanliness level; Cleanroom; Mean air age; Mini environment

Indexed keywords

AIR POLLUTION; FLOW MEASUREMENT; FLOW RATE; NUMERICAL METHODS;

CLEANLINESS LEVEL; MEAN AIR-AGE; MINI-ENVIRONMENTS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 43849103963     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2008.2000271     Document Type: Conference Paper

References (16)

1. M. D. Oh, "A trend of giga level cleanroom technology," in Proc. Int. Symp. Clean Technology and Management for Indoor Air, Korea Ait-Cleaning Association, 2002, pp. 17-62.
2. J. Schliesser and P. Staudt-Fischbach, "Minienvironments and thermal effects," in Proc. IEEE/SEMI Advanced Semiconductor Manufacturing Conf., 1999, pp. 432-439.
3. Y. Kobayashi, S. Kobayashi, K. Tokunaga, K. Kato, and T. Minami, "Particle characteristics of 300-mm minienvironment (FOUP and LPU)," IEEE Trans. Semiconduct. Manuf., vol. 13, pp. 259-263, 2000.
4. S. B. Zhu, "Study of airborne molecular contamination in minienvironments," in Proc. IEEE/SEMI Advanced Semiconductor Manufacturing Conf., 2002, pp. 309-313.
5. H. R. Shiu, H. Y. Huang, S. L. Chen, and M. T. Ke, "Numerical simulation for air flow in mini-environment and SMIF enclosure," IEEE Trans. Semiconduct. Manuf., vol. 16, pp. 60-67, 2003.
6. S. C. Hu and T. M. Wu, "Experimental study of airflow and particle characteristics of a 300-mm FOUP/LPU minienvironment system," IEEE Trans. Semiconduct. Manuf., vol. 16, pp. 660-667, 2003.
7. S. C. Hu, Y. K. Chuah, and M. C. Yen, "Design and evaluation of a minienvironment for semiconductor manufacture process," Build. Environ., vol. 37, pp. 201-208, 2002.
8. Y. K. Chuah, C. H. Tasi, and S. C. Hu, "Simultaneous control of particle contaminants and VOC pollution under different operating conditions of a mini-environment that contains a coating process," Build. Environ., vol. 35, pp. 91-99, 2000.
9. T. Xu, "Characterization of minienvironments in a clean room: Design characteristics and environmental performance," Build. Environ., vol. 42, pp. 2993-3000, 2007.
10. T. Xu, "A study on the operation performance of a minienvironment system," J. IEST, vol. 49, pp. 63-71, 2006.
11. M. Sandberg, "Ventilation efficiency as a guide to design," ASHRAE Trans., vol. 89, pp. 455-479, 1983.
12. H. T. Han, "Numerical analysis of local exhaust effectiveness using reverse-flow calculation method," J. SAREK, vol. 10, pp. 658-665, 1998.
13. M. S. Park, "Analysis of 3-Dimensional Flow Characteristics in a Clean Room With Low Pressure Drop Filter Installation," Ph.D. dissertation, Hanyang Univ., Seoul, Korea, 1993.
14. K. C. Noh, S. C. Lee, and M. D. Oh, "A numerical analysis on the airflow characteristics in super cleanrooms with different design types," J. SAREK, vol. 15, pp. 751-761, 2003.
15. S. V. Patankar, Numerical Heat Transfer and Fluid Flow. Washington, DC: Hemisphere, 1980.
16. W. Whyte, Cleanroom Technology: Fundamentals of Design, Testing and Operation. Chichester, U.K.: Wiley, 2001.