An innovative method for dynamic characterization of fan filter unit operation

Journal of the IEST

Volumn 50, Issue 2, 2007, Pages 85-97

  Xu, Tengfang ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Air pressure; Airflow rate; Airflow uniformity; Cleanroom; Energy efficiency; Fan filter unit (FFU); Test standard

Indexed keywords

ATMOSPHERIC PRESSURE; BANDPASS FILTERS; CLEAN ROOMS; ENERGY EFFICIENCY; LABORATORIES;

AIR FLOW-RATE; AIR PRESSURES; AIRFLOW UNIFORMITY; FAN FILTER UNITS (FFU); TEST STANDARDS;

AIR FILTERS;

EID: 67650079827     PISSN: 10984321     EISSN: None     Source Type: Journal    
DOI: 10.17764/jiet.50.2.p5k6lv061h64h1w8     Document Type: Article

References (17)

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