The development of fan filter unit with flow rate feedback control in a cleanroom

Building and Environment

Volumn 42, Issue 10, 2007, Pages 3556-3561

  Chen, Juhn Jie ^a   Lan, Chao Ho ^a   Jeng, Ming Shan ^a   Xu, Tengfang ^b  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Airflow; Cleanroom; Contamination control; Energy; Fan filter unit; Uniformity

Indexed keywords

AERODYNAMICS; CLEAN ROOMS; FEEDBACK CONTROL; FLOW CONTROL; FLOW RATE; FLOW VELOCITY;

AIRFLOW; CONTAMINATION CONTROL; FAN FILTER UNIT;

AIR FILTERS;

AERODYNAMICS; AIR FILTERS; CLEAN ROOMS; FEEDBACK CONTROL; FLOW CONTROL; FLOW RATE; FLOW VELOCITY;

AIRFLOW; CONTROL SYSTEM; FILTER;

EID: 34249952047     PISSN: 03601323     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.buildenv.2006.10.026     Document Type: Article

References (10)

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