Numerical simulation for air flow in the mini-environment and SMIF enclosure

IEEE Transactions on Semiconductor Manufacturing

Volumn 16, Issue 1, 2003, Pages 60-67

  Shiu, Huan Ruei ^a   Huang, Hsiao Yi ^a   Chen, Sih Li ^a   Ke, Ming Tsun ^b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

Air cleanliness; Air flow field; Mini environment; SMIF enclosure

Indexed keywords

AIR PURIFICATION; COMPUTER SIMULATION; PARTICLES (PARTICULATE MATTER); PRESSURE DISTRIBUTION; VLSI CIRCUITS;

AIR CLEANLINESS; AIR FLOW; AIR FLUX; STANDARD MECHANICAL INTERFACE;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0037330811     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2002.807737     Document Type: Article

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