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Volumn , Issue , 2002, Pages 309-313
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Study of airborne molecular contamination in minienvironments
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTIVATION ENERGY;
BOUNDARY CONDITIONS;
CONTAMINATION;
DIFFERENTIAL EQUATIONS;
INTERFACES (MATERIALS);
LAPLACE TRANSFORMS;
MASS TRANSFER;
MATHEMATICAL MODELS;
SILICON WAFERS;
AIRBORNE MOLECULAR CONTAMINATION;
PECLET NUMBER;
SEMICONDUCTOR DEVICE MANUFACTURE;
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EID: 0036079674
PISSN: 1523553X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (8)
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References (3)
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