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Volumn 42, Issue 6, 2007, Pages 2299-2304

Performance of large fan-filter units for cleanroom applications

Author keywords

Airflow; Cleanroom; Energy efficiency; Energy performance index (EPI); Fan filter unit (FFU); Total pressure efficiency (TPE)

Indexed keywords

AERODYNAMICS; AIR FILTERS; AIR QUALITY; CONTAMINATION; ENERGY EFFICIENCY; FANS;

EID: 33847195028     PISSN: 03601323     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.buildenv.2006.05.007     Document Type: Article
Times cited : (37)

References (13)
  • 1
    • 33847179807 scopus 로고    scopus 로고
    • The Institute of Environmental Sciences and Technology (IEST). IEST handbook of standards and practices, recommended practice in contamination control, IEST-RP-CC012.1: considerations in cleanroom design. Rolling Meadows, IL, USA: IEST; 1998.
  • 2
    • 6344255034 scopus 로고    scopus 로고
    • Xu T. Considerations for efficient airflow design in cleanrooms. Journal of the IEST 2004;47:24-8; Lawrence Berkeley National Laboratory Report, LBNL-55970. Berkeley, CA, USA. Rolling Meadows, IL: Institute of Environmental Sciences and Technology (IEST); 2004.
  • 3
    • 6344280009 scopus 로고    scopus 로고
    • Xu T. Performance evaluation of cleanroom environmental systems. Journal of the IEST 2003;46:66-73. Lawrence Berkeley National Laboratory Report, LBNL-53282, Berkeley, CA, USA. Rolling Meadows, IL: Institute of Environmental Sciences and Technology (IEST).
  • 4
    • 0041811697 scopus 로고    scopus 로고
    • Lee AH, Karman F. Energy conservation measures for industrial facilities. HPAC Engineering 2003;July:45-9. 1300 E. 9th St. Cleveland, OH: www.HPAC.com.
  • 5
    • 33847216518 scopus 로고    scopus 로고
    • Williamson MC. Energy efficiency in semiconductor manufacturing: a tool for cost savings and pollution prevention. Journal of Semiconductor Fabtech, Edition 8 (Section 3: Clean Room) 1998.
  • 6
    • 33847188094 scopus 로고    scopus 로고
    • Xu T. Laboratory method of testing energy performance of fan-filter units. Lawrence Berkeley National Laboratory Report, LBNL-54626, Berkeley, CA, USA, V1.3, June 2005.
  • 7
    • 33847217919 scopus 로고    scopus 로고
    • ASHRAE/ANSI Standard 51 (ANSI/AMCA 210-99). Laboratory methods of testing fans for rating. Arlington Height, IL, USA: Air Movement and Control Association International, Inc.; 1999.
  • 8
    • 33847224478 scopus 로고    scopus 로고
    • Jeng MS, Tsau F. Fan-filter unit (FFU) test procedures. Semiconductor Fabtech, 15th ed., 2002. p. 77-80.
  • 9
    • 6344260666 scopus 로고    scopus 로고
    • Xu T, Jeng M. Laboratory evaluation of fan-filter units' aerodynamic and energy performance. Journal of the IEST 2004;47:116-20. Lawrence Berkeley National Laboratory Report, LBNL-54250, Berkeley, CA, USA.
  • 10
    • 33847186260 scopus 로고    scopus 로고
    • Xu T. Introducing a Standard Testing Method for Fan-filter Units, Controlled Environments - Contamination Control for Life Sciences and Microelectronics (formerly A2C2 Magazine), September 2004. Lawrence Berkeley National Laboratory Report, LBNL-55462, Berkeley, Calif., USA. 2004.
  • 11
    • 33847195716 scopus 로고    scopus 로고
    • International Organization for Standardization (ISO). ISO/DIS 14644-1 cleanrooms and associated controlled environments. Part 1: Classification of air cleanliness. Rolling Meadows, IL, USA: The Institute of Environmental Sciences and Technology (IEST); 1999.
  • 12
    • 33847241222 scopus 로고    scopus 로고
    • International Organization for Standardization (ISO). ISO/DIS 14644-3: cleanrooms and associated controlled environments. Part 3: Metrology and test methods. Rolling Meadows, IL, USA: The Institute of Environmental Sciences and Technology (IEST); 2002.
  • 13
    • 33847179446 scopus 로고    scopus 로고
    • The Institute of Environmental Sciences and Technology (IEST). IEST handbook of standards and practices, recommended practice in contamination control, IEST-RP-CC006.2: testing cleanrooms, Rolling Meadows, IL, USA, 1997, ISBN: 1-877862-26-6.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.