Simulation and testing of pollutant dispersion during preventive maintenance in a cleanroom

Building and Environment

Volumn 44, Issue 12, 2009, Pages 2319-2326

  Shih, Hui Ya ^a   Huang, Shih Hsuan ^b   Li, Shou Nan ^a   Chen, Sheng Chieh ^b   Tsai, Chuen Jinn ^b  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Airborne molecular contamination; Cleanroom; Gas sensors; Preventive maintenance

Indexed keywords

AIRBORNE MOLECULAR CONTAMINATION; DETECTION LIMITS; EMISSION SOURCES; EXPERIMENTAL DATA; EXPERIMENTAL VALUES; FOURIER TRANSFORM INFRARED SPECTROMETER; GAS CONCENTRATION; GAS SENSORS; MIXED MODELS; MONITORING SYSTEM; NUMERICAL RESULTS; POLLUTANT CONCENTRATION; POLLUTANT DISPERSIONS; PRODUCT YIELDS; REAL TIME; SEMICONDUCTOR FAB; SIMULATION AND TESTING; THREE-DIMENSIONAL NUMERICAL MODELS;

CLEAN ROOMS; CONCENTRATION (PROCESS); GAS DETECTORS; INFRARED SPECTROMETERS; LABORATORIES; OCCUPATIONAL RISKS; POLLUTION; SENSORS; SULFUR; SULFUR HEXAFLUORIDE;

PREVENTIVE MAINTENANCE;

AIR QUALITY; COMPUTER SIMULATION; CONCENTRATION (COMPOSITION); DISPERSION; EXPERIMENTAL STUDY; FOURIER TRANSFORM; FTIR SPECTROSCOPY; INDOOR AIR; MAINTENANCE; MONITORING SYSTEM; NUMERICAL MODEL; POLLUTANT TRANSPORT; TESTING METHOD;

EID: 67651067963     PISSN: 03601323     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.buildenv.2009.03.018     Document Type: Article

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